Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Si Nano etching

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Below are images illustrating works that have been done during the ph.d. projects.

  • 1. 3D silicon photonic crystal membranes.
    1. 3D silicon photonic crystal membranes.
  • 2. Comparison of scallops by traditional Bosch process and modified DREM process.
    2. Comparison of scallops by traditional Bosch process and modified DREM process.
  • 3. 3D silicon microstructures fabricated by DREM process.
    3. 3D silicon microstructures fabricated by DREM process.
  • 4. 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
    4. 3D silicon micro-mesh structures integrated with ZnO nanowires for photocatalysis and photocurrent generation.
  • 5. 3D silicon stacked nanowires for structural color generation.
    5. 3D silicon stacked nanowires for structural color generation.
  • 6. High aspect ratio silicon micropillars fabricated with DREM process.
    6. High aspect ratio silicon micropillars fabricated with DREM process.
  • 7. ZIF-8 crystals for tunable structural colors.
    7. ZIF-8 crystals for tunable structural colors.
  • 8. Using OES to monitor the fluorocarbon film deposition with Pegasus 1.
    8. Using OES to monitor the fluorocarbon film deposition with Pegasus 1.
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