Specific Process Knowledge/Thermal Process/Pyrolysis/Pyrolysis with Multipurpose Anneal Furnace
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Pyrolysis Recipes
Because the properties of the final carbon are largely depending on the pyrolysis process as well as the polymer precusors, each parameter has a different influence. By modifying those parameters, the properties of pyrolytic carbon can be tailored. The number of steps, the maximum temperature of each step, the heating rate, the dwell time at the maximum temperature and the gas composition inside the furnace are the parameters that can be changed to control the properties of pyrolytic carbon. At DTU Nanolab, the polymer precusor mostly is SU-8 negative photoresist and high temperature 3D printing resin. Depend on the designed properties of pyrolytic carbon material, pyrolysis process will be optimized.
Optimized Recipe for the conductivity of pyrolytic carbon
For using pyrolytic carbon as a working electrode for electrochemical sensor, the conductivity of the pyrolytic carbon must be maximized. The main goal of this recipe is to obtain the carbon material with highest conductivity as possible. The conductivity is measured by probe station with 4 points probe method.
Recipe: ""
| Parameter | Value |
|---|---|
| Precusor | SU-8 |
| Number of step | 1 |
| Final Temperature | 1100oC |
| Ramping Rate | 2oC per minute |
| Annealing time at final temperature | 6 hours |
| Gas | 20 sccm N2 |