Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope

From LabAdviser

Process optimization using the Picoscope

The Pegasus tools were delivered with a set of standard recipes


4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software