Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1

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XPS analysis of ALD deposited layers

How to fit data with multiple spectra and levels

Use one processing grid to hold all spectra to be fitted.
Each processing grid has a peak table that holds all the peaks for each level. Making depth profiles cannot be made across processing grids. Survey spectra must be kept in separate grids - if not the peak table of the survey spectrum will get mixed with the high resolution spectra.
Do not mix snapshot and scanned spectra in processing grid
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