Specific Process Knowledge/Characterization

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Overview of

' Microscopes SEM (incl. EDX) AFM Stylus profiler Optical profiler Filmtek (reflectometer) Ellipsometer Thickness stylus XPS PL mapper 4-point probe Probe station XRD Life time scanner Drop shape analyser Hardness tester
Thin film thickness x 1) x 1) x 2) x 2) x x x x 3) x
Defects x x
Wafer thickness x 1) x 1) x
Step coverage x 1) x 1)
Particles x x x
Element analysis x x x 4) x 4)
Surface roughness x x x
Deposition uniformity x x x
Film stress x x
Refractive index x x
Reflectivity x x (x)
Resistivity x
Breakdown voltage
electrical conductivity x
Thermal conductivity
Optical gap x x
Crystalinity x
Charge carrier life time x
Contact angle hydrofob/hydrofil x
Hardness measure x

Choose characterization topic

Choose equipment

AFM

Element analysis

Optical and stylus profilers

Optical microscopes

Optical characterization


SEM's at CEN

SEM's at Danchip

TEM's at CEN

Various

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