LabAdviser/314/Microscopy 314-307/SEM/Nova/Micro 4-point probe

Kleindiek micromanipulator

The Kleindiek Nanotechnik MM3A-EM is a plug and play micromanipulator for SEM/FIB applications, with a versatile range of modular plug-ins. The MM3A-EM can be used in most SEM/FIB instruments and offers fast setup and removal. The system consists of a base over which the micromanipulator arm is mounted (Figure 1). The base can be attached to the SEM front door by two exagonal head screws (Figure 2).The arm is connected to the external power supply through two plug-ins on a PCB board mounted on the SEM door.

Front Image - - - Figure 1: the base with the micromanipulator mounted on it. Figure 2: the micromanipulator mounted on the Nova NanoSEM door. Controlling the MM3A The MM3A can be controlled in two ways: using the Joypad or the Nanocontroller. The possible micromanipulator movements are shown in figure 3. The two controllers can control in either fine or coarse mode depending on the speed selection. There are six speeds available, three in coarse mode and three in fine mode. Figure 3: the possible movements of the micromanipulator. Capres M4PP SEM Module The Capres M4PP SEM Module expands the capabilities of standard Scanning Electron Microscopes (SEM) with in-situ Microscopic Four Point Probing (M4PP). The M4PP SEM Module consists of a probe holder that attaches to a micro manipulator inside the SEM chamber, a stand-alone instrumentation unit, and software for control and data acquisition. The range of applications can vary from surface layer transport measurement to interconnect probing, to sheet resistance characterization, to characterization of inhomogeneous or microstructured advanced materials e.g. ultra-thin films and nanowires. Module schematic Figure 4: module schematics of the SEM Module system with all its components.