Specific Process Knowledge/Characterization/Probe station
Probe station
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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc, it has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.
It has several source meters, multi meters and a computer attached.
Purpose |
Thickness measurer |
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---|---|---|
Performance |
Thickness resolution |
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Substrates |
Batch size |
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Substrate materials allowed |
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The user manual, technical information and contact information can be found in LabManager: