Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD
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ALD Picosun R200
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THIS PAGE IS UNDER CONSTRUCTION
EtZn
2
O
EtZn
2
O
H
2
O
H
2
O
TMA
TMA
H
2
O
H
2
O
Nitrogen flow
200 sccm
200 sccm
150 sccm
150 sccm
200 sccm
200 sccm
Pulse time
0.1 s
0.1 s
0.1 s
0.1 s
0.1 s
0.1 s
0.1 s
0.1 s
Purge time
0.5 s
20.0 s
0.5 s
20.0 s
0.5 s
20.0 s
0.5 s
20.0 s
# cycles
20
1
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