Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE/Nitride etch with DUV mask
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Silicon nitride etch with STS recommended silicon nitride recipe
Silicon nitride etch with the standard silicon oxide etch
- Etch of LPCVD nitride with DUV KRF resist as mask. The mask is still on. Made by BGHE February 2015