Specific Process Knowledge/Characterization/XPS/Processing/Basics
XPS data processing guide
This section shows all actions performed with Avantage (version 5.498) during an analysis of a sample.
Open data and save the processing document
Locate the .VGX file in the experiment data tree. Either open the experiment by selecting 'Open Experiment' in Avantage, or double click on the .VGX file.
It is a very good idea to save the processing document as you analyze the data (Avantage may crash some times) - to do so, select 'Save Processing Document' and you analysis will be saved as a .VGD file.
Survey spectrum and depth profile
As seen in the screendump below, the experiment consists of a survey spectrum and a series of high resolution spectra