Specific Process Knowledge

2nd Level - Process Topic

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Choose the process topic you are interested in

• Back-end processing

• Characterization

• E-beam lithography

• Etch

• Imprinting

• Lithography

• Thermal Process

• Thin film deposition

• Wafer and sample drying

• Wafer Bonding

• Wafer Cleaning

• Wafer Information

• III-V Process

This section is under construction

Sample processing:

Clean the sample

Drying Samples

Make a layer on the sample
	Thermal Oxide growth
	Thin Film deposition
		Sputter deposition
		Thermal deposition
		E-beam evaporation
	CVD
		LPCVD
		PECVD
	Coating
		Spin coating
		Spray coating
	Electroplating
	Epitaxial growth

Thermal treatment of the sample

Make a mask on the sample

• • Lithography
  • Imprinting

Transfer pattern into the sample

• • Wet etch
  • Dry etch
  • Lift-off

Direct structure definition

• • Imprinting
  • LASER machining
  • Lithographic definition
  • Polymer Injection molding

Bonding samples together

Characterize the sample

Back end of the sample

• • Chip/die mounting
  • Wire bonding
  • Dicing