Specific Process Knowledge

2nd Level - Process Topic

Feedback to this page: click here

Choose the process topic you are interested in

• Back-end processing

• Characterization

• E-beam lithography

• Etch

• Imprinting

• Lithography - New entry by the 18th of September - take a look

• Photolithography

• Thermal Process

• Thin film deposition

• Wafer and sample drying

• Wafer Bonding

• Wafer Cleaning

• Wafer Information

• III-V Process

This section is under construction

Sample processing:

• Clean the sample
• Drying Samples
• Make a layer on the sample
• Thermal Oxide growth
  • PVD
    • Sputter deposition
    • Thermal deposition
    • E-beam evaporation
  • CVD
    • LPCVD
    • PECVD
  • Coating
    • Spin coating
    • Spray coating
    • Electroplating
    • Epitaxial growth
• Thermal treatment of the sample
• Make a mask on the sample
  • Lithography
  • Imprinting
• Transfer pattern into the sample
  • Wet etch
  • Dry etch
  • Lift-off
• Direct structure definition
  • Imprinting
  • LASER machining
  • Lithographic definition
  • Polymer Injection molding
• Bonding samples together
• Characterize the sample
• Back end of the sample
  • Chip/die mounting
  • Wire bonding
  • Dicing