Specific Process Knowledge/Etch/Wet Platinum Etch

Ething of Platin can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done with IBE by sputtering with Ar ions.

Platin can be etched by the following wet etch:

• HCl:HNO3:H2O 7:1:8 at 85 °C

At this moment we do not have any information on the etch rate. You should be aware that this wet etch will also etch gold and it is not possible to use any masking material, it is used as a stripper.

Use the fumehood in cleanroom 2 for the setup. Use a glass beaker. Write content on beaker and which metals has been etched with yellow permanent pen.