LabAdviser/Introduction to LabAdviser and Processing

Introduction to LabAdviser

LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. LabAdviser is meant to advise you to a good starting point for your cleanroom process for you to further optimization to meet your needs.

The structure of LabAdviser is designed to guide the users to find the process information they need. The idea is that the user knows what process step is needed. For example if a gold deposit is needed on a 100mm wafer. The user goes to: Main page -> Specific Process Knowledge -> Thin Film Deposition -> Gold. Then the user comes to an overview page describing how to deposit gold at Danchip. From there the user decides whether to use the Alcatel, Wordentec or Sputter System Lesker to do it and get the available process information on the chosen equipment. This example is illustrated in the image to the right.

The image gives an idea of the page tree structure in LabAdviser and also an idea of the thoughts behind the structure. The questions to ask overall are:

• What process step do I need to applay to my sample?
  
• How can I apply this step to my sample at DTU Danchip?
  

To view a larger image look here

Introduction to Processing

Take a look at the process example "Solar cell process flow". This is an example of how to build up a process flow for a component you can make at Danchip. Throughout the example you can find links to relevant pages in LabAdviser where information about the different processes are given.