Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ
Some questions and answers
This section contains material from email correspondence with SPTS. The content is, at most, only slightly modified from the original emails and thus may appear somewhat sloppily written. You may, however, find some useful answers. The idea is to share some valuable and potentially very useful information that would otherwise be hidden from everybody except the persons in the correspondence. Hidden deep inside an email correspondence, the information is also very likely to get completely lost should the people involved decide to change job.