Specific Process Knowledge/Etch/DRIE-Pegasus

DRIE-Pegasus

The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further. In the ASE the Bosch process has two cycles, etch and passivation. Within each cycle the process parameters are kept constant (This is, at least, that is the intention - the reality is that the ideal square function is rarely achieved during process parameter changes). In the passivation cycle, using C₄F8 covers all

Details on DRIE-Pegasus

Further info:

FAQ (Under construction)

Nanoetch (Under construction)