Specific Process Knowledge/Characterization/SEM Gemini 1/ma
Safety
The SEM Gemini 1 is a state of the art High resolution SEM with latest technology on low acceleration voltage imaging. Compared to the Supra models in the cleanroom, the Gemini 1 features a lot of sophisticated features that require specific training in order to ensure:
- Instrument safety: If not correctly operated, the instrument may suffer irreperable damage.
- User value: The level of sophistication is very high so unless correctly instructed, chances are that a certain mode may be incorrectly applied and the user will only waste time.
Below is a list of features or modes that require specific training in addition to the 'standard' training. All specific trainings will be added to the personal LabManager competence page. If a user is observed using the instrument without proper training, the competences will revoked.
List of modes/features/detectors that require specific individual training
- NanoVP mode
- STEM detector
- BSED detector
- Loading 150 mm wafers
- Tandem deceleration