Specific Process Knowledge/Etch/Aluminum Oxide

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Etching Al₂O₃ can be done both chemically (wet) and by dry etching. Chemical etching can be done using BHF (60nm/min) or a developer (4nm/min). This will be selective to most materials not containing Al. We have done some test of Al₂O₃ in dry etching. It has been mostly tested in the III-V ICP and ICP Metal. Please see links below.

• Al₂O₃ etch using ICP metal
• Al₂O₃ etch using III-V ICP
• Al₂O₃ etch using HF