Specific Process Knowledge/Characterization/XPS/Access

From LabAdviser
Revision as of 10:47, 1 May 2023 by Jmli (talk | contribs)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

How to get access to the XPS

Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

If you already a user at DTU Nanolab and have access to LabManager you must complete the access request form following the link below:

Theoretical background material

The course material of an XPS course offered at the Technical University of Munich explains the theory behind XPS. Read sections 1-4.3 (pages 1-16) of File:Electron Spectroscopy of surfaces.pdf.