Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep

From LabAdviser
< Specific Process Knowledge‎ | Etch‎ | ICP Metal Etcher‎ | silicon‎ | nano
Revision as of 16:05, 2 February 2023 by Jmli (talk | contribs)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search

Feedback to this page: click here Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

  • The profiles of the 180 nm zep resist

  • The 30 nm zep profile

  • The 60 nm zep profile

  • The 90 nm zep profile

  • The 120 nm zep profile

  • The 150 nm zep profile

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep&oldid=44020"