Specific Process Knowledge/Characterization/Hardness measurement

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Hardness tester

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the roughness reliably.

The user manual, technical information and contact information can be found in LabManager:

Equipment info for: Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.

Equipment performance and process related parameters

Purpose	Hardness tester	Sample hardness (Vickers) Film hardness (Vickers)
Performance	Available test forces	0,098 N (0,01 kgf) 0,24 N (0,025 kgf) 0,49 N (0,05 kgf) 0,98 N (0,1 kgf) 1,96 N (0,2 kgf) 2,94 N (0,3 kgf) 4,9 N (0,5 kgf) 9,8 N (1 kgf) 19,6 N (2 kgf)
Performance	Data output	Machine can calculate hardness in HV (Hardness Vickers) and show result on display The integrated printer has been disabled (not cleanroom compatible)
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions (besides sample must be non-toxic, dry and free from chemical residues)
	Calibration samples available	277 HV 1 464 HV 1 704 HV 1