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Specific Process Knowledge/Thin Film deposition/ALD/Al2O3 deposition using ALD
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Specific Process Knowledge
Revision as of 16:41, 19 February 2014 by
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THIS PAGE IS UNDER CONSTRUCTION
Al
2
O
3
thickness as function of number of cycles, temperature 300
o
C. Evgeniy Shkondin, DTU Danchip, February 2014.
Al
2
O
3
thickness as function of number of cycles, temperature 200
o
C. Evgeniy Shkondin, DTU Danchip, February 2014.
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