Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic

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Cleaning of wafers or chips that have been out of the cleanroom

Soap sonic clean placed in the wash bench in the changing room.

The soap sonic is done in a ultrasonic tank placed in the wash bench in the changing room. The soap sonic is DI water with Triton x100 which is free of alkalies. It is used for wafers or chips that has been out of the cleanroom eg. if they have been diced, and you want to bring them in again for measurement or further processing. The soap sonic clean is not enough, you also have to make a piranha clean. If your samples cannot withstand piranha then you must ask Danchip for special permission to bring in your samples without the piranha.

Procedure

You fill up the tank with DI water and add 20 - 30 drops of Triton x100 soap. Start the sonic and leave for 10 min. rinse, dry and continue with piranha.