Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions
| Line 8: | Line 8: | ||
This QZ plate is bonded to a Si wafer. | This QZ plate is bonded to a Si wafer. | ||
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" | ||
|+ '''Cr etch''' | |+ '''Cr etch''' by bghe@danchip | ||
|- | |- | ||
! Parameter | ! Parameter | ||
|'''Cr etch''' | |'''Cr etch''' | ||
|- | |- | ||
! Cl<sub>2</sub> (sccm) | ! Cl<sub>2</sub> (sccm) | ||