Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions

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 *As many small samples as can be fitted on a 100mm wafer
-*1 50 mm wafer fitted on a 100mm wafer
+*<nowiki>#</nowiki>1 50 mm wafer fitted on a 100mm wafer
-*1 100 mm wafer
+*<nowiki>#</nowiki>1 100 mm wafer
-*1 150 mm wafers (only when the system is set up to 150mm)
+*<nowiki>#</nowiki>1 150 mm wafers (only when the system is set up to 150mm)
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 *As many small samples as can be fitted on a 100mm wafer
-*1 50 mm wafer fitted on a 100mm wafer
+*<nowiki>#</nowiki>1 50 mm wafer fitted on a 100mm wafer
-*1 100 mm wafer
+*<nowiki>#</nowiki>1 100 mm wafer
-*1 150 mm wafers (only when the system is set up to 150mm)
+*<nowiki>#</nowiki>1 150 mm wafers (only when the system is set up to 150mm)
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 *As many small samples as can be fitted on a 150mm wafer
-*5 50 mm wafer fitted on a 150mm wafer
+*<nowiki>#</nowiki>5 50 mm wafer fitted on a 150mm wafer
-*1 100 mm wafer on a 150mm wafer
+*<nowiki>#</nowiki>1 100 mm wafer on a 150mm wafer
-*1 150 mm wafers (The system is normally set up to 150mm)
+*<nowiki>#</nowiki>1 150 mm wafers (The system is normally set up to 150mm)
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 *As many samples as can be securely fitted on a up to 200mm wafer
-*1 50 mm wafer with special carrier
+*<nowiki>#</nowiki>1 50 mm wafer with special carrier
-*1 100 mm wafer with special carrier
+*<nowiki>#</nowiki>1 100 mm wafer with special carrier
-*1 150 mm wafers with special carrier
+*<nowiki>#</nowiki>1 150 mm wafers with special carrier
-*1 200 mm wafer
+*<nowiki>#</nowiki>1 200 mm wafer
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