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Specific Process Knowledge/Etch/Etching of Platinum: Difference between revisions

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==Comparison of Gold Etch Methods==
==Comparison of Platinum Etch Methods==


{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"  
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|-style="background:silver; color:black"
|-style="background:silver; color:black"
!
!
![[Specific Process Knowledge/Etch/Wet Gold Etch|Au wet etch 1]]
![[Specific Process Knowledge/Etch/Wet Patinum Etch|Pt wet etch]]
![[Specific Process Knowledge/Etch/Wet Gold Etch|Au wet etch 2]]
![[Specific_Process_Knowledge/Etch/IBE&frasl;IBSD Ionfab 300|IBE (Ionfab300+)]]
![[Specific_Process_Knowledge/Etch/IBE&frasl;IBSD Ionfab 300|IBE (Ionfab300+)]]
|-
|-
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Generel description
!Generel description
|Wet etch of Au using Iodine based chemistry
|Wet etch of Pt
|Wet etch of Au using Aqua Regina
|Sputtering of Pt
|Sputtering of Au - pure physical etch
|-
|-


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*~100nm/min
*~100nm/min
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*~?nm/min - fast etch
*~55nm/min (not tested yet)  
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*~55nm/min (acceptance test)  
|-
|-


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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Etch profile
!Etch profile
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*Isotropic
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*Isotropic
*Isotropic
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!Masking material
!Masking material
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*Photoresist
*None (only used for stripping Pt)
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*None (only used for stipping Au)
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*Any material that is allowed in the chamber, photoresists included  
*Any material that is allowed in the chamber, photoresists included  
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!Substrate size
!Substrate size
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*Any size and number that can go inside the beaker in use  
*Any size and number that can go inside the beaker in use
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*Any size and number that can go inside the beaker in use
 
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Smaller pieces glued to carrier wafer
Smaller pieces glued to carrier wafer
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!'''Allowed materials'''
!'''Allowed materials'''
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No restrictions cross contamination wise as long as you use the right beaker and make sure that they are safe to enter in the chemicals  
No restrictions cross contamination wise as long as you use the right beaker and make sure that they are safe to enter in the chemicals
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No restrictions cross contamination wise as long as you use the right beaker and make sure that they are safe to enter in the chemicals
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*Silicon  
*Silicon  
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