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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
{|
{|
| SF<sub>6</sub>: 0-100 sccm
| \cdot SF<sub>6</sub>: 0-100 sccm
| O<sub>2</sub>: 0-100 sccm
| O<sub>2</sub>: 0-100 sccm
|-
|-
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