Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch: Difference between revisions
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=More test with CF4 | =More test with CF4/H2 - SiO2 etch= | ||
Tests performed by Maria Farinha @DTU Nanolab | Tests performed by Maria Farinha @DTU Nanolab |
Revision as of 15:29, 26 January 2024
More test with CF4/H2 - SiO2 etch
Tests performed by Maria Farinha @DTU Nanolab
Recipes and results - CF4 / H2 tests