Template:Spinning Track1: Difference between revisions
New page: Use Trak1 and find the recipe you will use. Choose from the list: *PR1_5 for 1,5 um resist thickness *PR2_2 for 2,2 um resist thickness *PR4_2 for 4,2 um resist thickness If you want to se... |
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*PR4_2 for 4,2 um resist thickness | *PR4_2 for 4,2 um resist thickness | ||
If you want to see parameters for those spins please refer to this document: | If you want to see parameters for those spins please refer to this document: | ||
[[media:Recipe_from_SSI.xls|Parameters from Track1]] | |||
Revision as of 13:05, 1 November 2007
Use Trak1 and find the recipe you will use. Choose from the list:
- PR1_5 for 1,5 um resist thickness
- PR2_2 for 2,2 um resist thickness
- PR4_2 for 4,2 um resist thickness
If you want to see parameters for those spins please refer to this document: Parameters from Track1