Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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Using patterned samples of 1 μm pillars with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 20nm of Al<sub>2</sub>O<sub>3</sub> were still intact. | Using patterned samples of 1 μm pillars with 50 nm of Al<sub>2</sub>O<sub>3</sub>. After the tests, approximately 20nm of Al<sub>2</sub>O<sub>3</sub> were still intact. | ||
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{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm Pillar recipe from March 2022 - #244 = 122 min | |+ 1μm Pillar recipe from March 2022 - #244 = 122 min | ||