Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 3: | Line 3: | ||
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | ||
As stated by [https://labadviser.nanolab.dtu.dk/images/5/5c/The_CORE_sequence.pdf Nguyen et al.], the | <!--As stated by [https://labadviser.nanolab.dtu.dk/images/5/5c/The_CORE_sequence.pdf '''Nguyen et al.'''], the SF<sub>6</sub> and O<sub>2</sub> fluxes are only separated after 4 s during the C-step. Shorter time steps than that do not execute the function of the clearing. After testing recipes with only 2 s of clearing and with no clear step, it was understood it could be eliminated, showing more depth as well as less undercut when going for shorter cycles. From then on, not CORE but ORE recipes were applied D/E = O/RE. | ||
From then on, not CORE but ORE recipes were applied | <br> | ||
Moreover, due to a delay of the MFC to read the pressure when compared with the power during E-step created unwanted bias. To fight it, the E-step was divided into <sub>6</sub> and E<sub>2</sub>. The E<sub>1</sub> of only 2 s is enough to stabilize the pressure, and .... | |||
--> | |||
