Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
→Au deposition: removed physimeca |
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! Sputter ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]]) | ! Sputter ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]]) | ||
! Sputter ([[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system|Sputter-system Metal-Oxide (PC1) and Sputter-system Metal-Nitride (PC3)]]) | ! Sputter ([[Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system|Sputter-system Metal-Oxide (PC1) and Sputter-system Metal-Nitride (PC3)]]) | ||
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#Sputter coater 03|(Sputter coater 03)]] | ! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#Sputter coater 03|(Sputter coater 03)]] | ||
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#Sputter coater 04|(Sputter coater 04)]] | ! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#Sputter coater 04|(Sputter coater 04)]] | ||
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| Sputter deposition of Au | | Sputter deposition of Au | ||
| Sputter deposition of Au | | Sputter deposition of Au | ||
| Sputter deposition of Au | | Sputter deposition of Au | ||
| Sputter deposition of Au | | Sputter deposition of Au | ||
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! Pre-clean | ! Pre-clean | ||
|Ar ion source | |Ar ion source | ||
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|RF Ar clean | |RF Ar clean | ||
|RF Ar clean | |RF Ar clean | ||
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|10 Å to 5000 Å ** | |10 Å to 5000 Å ** | ||
|10 Å to 5000 Å ** | |10 Å to 5000 Å ** | ||
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|Depends on process parameters, 1-10 Å/s | |Depends on process parameters, 1-10 Å/s | ||
|Depends on process parameters | |Depends on process parameters | ||
|Not measured | |Not measured | ||
|Not measured | |Not measured | ||
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*Up to 10x6" or 4" wafers | *Up to 10x6" or 4" wafers | ||
*Many small pieces | *Many small pieces | ||
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*Several smaller samples | *Several smaller samples | ||
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* Almost any as long as it does not outgas - see cross-contamination sheets in Labmanager | * Almost any as long as it does not outgas - see cross-contamination sheets in Labmanager | ||
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* All samples allowed in the SEM Supra 1 | * All samples allowed in the SEM Supra 1 | ||
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* Takes approx. 12 minutes to load and transfer samples | * Takes approx. 12 minutes to load and transfer samples | ||
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* Used for gold sputter coating of samples before SEM inspection | * Used for gold sputter coating of samples before SEM inspection | ||