Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions
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'''**''' ''To deposit a cumulative thickness above 200 nm permission is required from metal@nanolab.dtu.dk to ensure enough material is present in the machine'' | '''**''' ''To deposit a cumulative thickness above 200 nm permission is required from metal@nanolab.dtu.dk to ensure enough material is present in the machine'' | ||
==Quality control of e-beam evaporated Ni films== | |||
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|bgcolor="#98FB98" |'''Quality control (QC) for Wordentec''' | |||
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*[http://labmanager.dtu.dk/d4Show.php?id=3736&mach=167 QC procedure for Wordentec]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=167 The newest QC data for Wordentec]<br> | |||
{| {{table}} | |||
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{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px" | |||
! QC Recipe: | |||
! Process 5 | |||
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|Deposition rate | |||
|10 Å/s | |||
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|Thickness | |||
|100 nm | |||
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|Pressure | |||
|Below 4*10<sup>-6</sup> mbar | |||
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{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px" | |||
!QC limits | |||
!Wordentec | |||
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|Measured average thickness (Å) | |||
|± 10 % | |||
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|Lowest accepted deposition rate (Å/s) | |||
|6 Å/s | |||
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Thickness is measured in 5 points with a stylus profiler. | |||
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{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality control (QC) for the Temescal''' | |||
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*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the Temescal]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the Temescal]<br> | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
! QC Recipe: | |||
! Standard recipes/Ni | |||
|- | |||
|Deposition rate | |||
|10 Å/s | |||
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|Thickness | |||
|100 nm | |||
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|Pressure | |||
|Below 1*10<sup>-6</sup> mbar | |||
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|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px" | |||
!QC limits | |||
!Temescal | |||
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|Deposition rate deviation | |||
|± 20 % | |||
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|Measured average thickness | |||
|± 10 % | |||
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|Thickness deviation across a 4" wafer | |||
|± 5 % | |||
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Thickness is measured in 5 points with a stylus profiler. <br> | |||
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au films. | |||
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Revision as of 15:35, 31 May 2022
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Nickel deposition
Nickel can be deposited by e-beam evaporation, sputtering or electroplating. In the chart below you can compare the different deposition equipment.
E-beam evaporation (Temescal) | E-beam evaporation (Wordentec) | E-beam evaporation (Physimeca) | Sputter deposition (Lesker) | Sputter deposition (Sputter-system Metal-Oxide (PC1) and Sputter-system Metal-Nitride (PC3)) | Electroplating (Electroplating-Ni) | |
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General description | E-beam deposition of Nickel | E-beam deposition of Nickel | E-beam deposition of Nickel | Sputter deposition of Nickel | Sputter deposition of Nickel | Electroplating of Nickel |
Pre-clean | Ar ion bombardment | RF Ar clean | RF Ar clean | RF Ar clean | None | |
Layer thickness | 10 Å to 1 µm * | 10 Å to 1 µm * | 10 Å to 2000 Å | 10 Å to 5000 Å ** | 10 Å to 5000 Å ** | ~ 20 µm to ~ 1000 µm |
Deposition rate | 2-10 Å/s | 10-15 Å/s | 1-10 Å/s | Depends on process parameters, about 1 Å/s | Depends on process parameters, at least ~ 4 Å/s, see conditions here | ~ 10-250 Å/s |
Batch size |
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Allowed materials |
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Base materials:
Seed metals:
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Comment |
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* To deposit a cumulative thickness above 600 nm permission is required from metal@nanolab.dtu.dk to ensure enough material is present in the machine
** To deposit a cumulative thickness above 200 nm permission is required from metal@nanolab.dtu.dk to ensure enough material is present in the machine
Quality control of e-beam evaporated Ni films
Quality control (QC) for Wordentec | ||||||||||||||||
Thickness is measured in 5 points with a stylus profiler. |
Quality control (QC) for the Temescal | ||||||||||||||||||
Thickness is measured in 5 points with a stylus profiler. |