Specific Process Knowledge/Thin film deposition/Deposition of Ruthenium: Difference between revisions

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	== Deposition of Ru ==		== Deposition of Ru ==
	Ruthenium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition ~~equipments~~:		Ruthenium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the different deposition equipment: