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Specific Process Knowledge/Thin film deposition/Deposition of Nickel: Difference between revisions

Reet (talk | contribs)
Reet (talk | contribs)
Nickel deposition: added cluster sputterer
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* Photoresist  
* Photoresist  
* Metals  
* Metals  
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*Almost any that do not outgas if you plan to use substrate heating. Check the cross-contamination sheets in Labmanager.
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Base materials:<br>
Base materials:<br>
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|May use high-strength magnet for deposition
|Sample must be compatible with plating bath (pH = 3,65 and T = 52°C). Seed metal necessary.
|Sample must be compatible with plating bath (pH = 3,65 and T = 52°C). Seed metal necessary.
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'''*''' ''To deposit layers thicker than 600 nanometers permission is required from metal@danchip.dtu.dk to ensure enough material is present in the machine''
'''*''' ''To deposit layers thicker than 600 nanometers permission is required from metal@nanolab.dtu.dk to ensure enough material is present in the machine''