Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Difference between revisions

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	== Tantalum deposition ==		== Tantalum deposition ==

	Tantalum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.		Tantalum can be deposited by e-beam evaporation and sputter deposition. In the chart below you can compare the different deposition equipment.