Template:SEM comparison table 314: Difference between revisions
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! Equipment | ! Equipment | ||
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!Purpose | !Purpose | ||
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!Equipment position | !Equipment position | ||
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|style="background:Whitesmoke; color:black" rowspan="2" align="left" |'''Resolution''' | |style="background:Whitesmoke; color:black" rowspan="2" align="left" valign="top" |'''Resolution''' | ||
|style="background:Whitesmoke; color:black" colspan="5" align="center"| The resolution of a SEM is strongly dependent on sample type and the operator. Resolution quoted is using sputtered gold on carbon | |style="background:Whitesmoke; color:black" colspan="5" align="center" valign="top"| The resolution of a SEM is strongly dependent on sample type and the operator. Resolution quoted is using sputtered gold on carbon | ||
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* High-vacuum | * High-vacuum | ||
**3.0nm at 30kV (SE) | |||
**10nm at 3kV (SE) | |||
**4.0nm at 30kV (BSE) | |||
* Low-vacuum | * Low-vacuum | ||
**3.0nm at 30kV (SE) | |||
** 4.0nm at 30kV (BSE) | |||
** > 12nm at 3kV (SE) --> | |||
|B | |B | ||
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* High vacuum | * High vacuum | ||
**0.8 nm at 30 kV (STEM) | |||
**1.0 nm at 30 kV (SE) | |||
**2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) | |||
*High vacuum with beam deceleration option | *High vacuum with beam deceleration option | ||
**3.0 nm at 1 kV (BD mode + BSE) | |||
* Low vacuum - 1.4 nm at 30 kV (SE) | * Low vacuum - 1.4 nm at 30 kV (SE) | ||
**2.5 nm at 30 kV (BSE) | |||
**3.0 nm at 3 kV (SE) | |||
* Extended vacuum mode (ESEM) | * Extended vacuum mode (ESEM) | ||
**1.4 nm at 30 kV (SE) | |||
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* High vacuum | * High vacuum | ||
**0.8 nm at 30 kV (STEM) | |||
**1.0 nm at 30 kV (SE) | |||
**2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) | |||
*High vacuum with beam deceleration option | *High vacuum with beam deceleration option | ||
**3.0 nm at 1 kV (BD mode + BSE) | |||
* Low vacuum - 1.4 nm at 30 kV (SE) | * Low vacuum - 1.4 nm at 30 kV (SE) | ||
**2.5 nm at 30 kV (BSE) | |||
**3.0 nm at 3 kV (SE) | |||
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* Electron Column | * Electron Column | ||
**0.8nm @15kV | |||
**0.9nm @1kV | |||
* Ion Column | * Ion Column | ||
**4.5nm @ 30kV | |||
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!Detectors | !Detectors | ||
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!Stage specifications | !Stage specifications | ||
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!Max sample size | !Max sample size | ||
|style="background:Whitesmoke; color:black" colspan="5" align="center"| Consult with DTU Nanolab staff as weight, dimensions, pumping capacity and technique all play a roll in the sample size | |style="background:Whitesmoke; color:black" colspan="5" align="center"| Consult with DTU Nanolab staff as weight, dimensions, pumping capacity and technique all play a roll in the sample size | ||