Specific Process Knowledge/Thin film deposition/Deposition of Silver/Deposition of Silver: Difference between revisions

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== Thermal deposition of Silver ==
== Thermal deposition of Silver ==


Note: This text is under construction
Silver can be thermally evaporated in Wordentec.


Silver can be thermally evaporated in Wordentec. The deposition rate is highly sensitive to the process parameters (at least for a requested deposition rate of 5 Å/s).
The parameters that are good to use for the deposition are listed here below.  


Therefore, different settings have been tested, to find a situation with rather stabel depositon rate.
(These parameters are changed inside the material section- please contact the process specialist if you are not familiar with this.) For thermal Ag deposition use:


These settings were fond to give a fairly stabel deposition rate:
'''Max power''': 6.7 % (With a higher max power, the deposition rate will have large flucturations).


Max power 6.6 %
'''Soak power 1''': 4 %


Soak power 1 : 4 %
'''Soak power 2''': 6.6 %


Soak power 2 : 6.6 %
Soak time 2: 1 min


Soak time 2: 1 min (can be set to for example 2 min, if a higher stability of the deposition rate is requested).
This gives a depositon rate of about 2.5 Å/s (to be set in the process parameters).


Deposition rate: (requested) '''2.5 Å/s'''
To get the right thickness measurement of the quartz crystals, use the prameters


Density : 10.5 (thermal evap. of Al, 2.7)
'''Density''': 10.5 (thermal evap. of Al 2.7)
Z-ratio : 0.529 (thermal evap. of Al 1.08)
 
'''Z-ratio''': 0.529 (thermal evap. of Al 1.08)


'''Master Tooling''' should be set to:  120% (to get the requested layer thickness on the wafer). (Master tooling for Al = 167%).
'''Master Tooling''' should be set to:  120% (to get the requested layer thickness on the wafer). (Master tooling for Al = 167%).




Actual value of deposition rate flucturate, staring at about 1 Å/s, going up to maximum 3 Å/s, and flucturating between 2-3 Å/s after a while.


15 pellets (1/8" diameter x 1/8" long) were placed in the boat before the evaporation processes were started. More than 8500 Å could be deposited from that amount, without any problem with covered contacts or smilar things.
 
 
(15 pellets (1/8" diameter x 1/8" long) were placed in the boat before the evaporation processes were started. More than 4000 Å could be deposited from that amount, without any problem with covered contacts or smilar things.)

Revision as of 14:55, 2 February 2009

Thermal deposition of Silver

Silver can be thermally evaporated in Wordentec.

The parameters that are good to use for the deposition are listed here below.

(These parameters are changed inside the material section- please contact the process specialist if you are not familiar with this.) For thermal Ag deposition use:

Max power: 6.7 % (With a higher max power, the deposition rate will have large flucturations).

Soak power 1: 4 %

Soak power 2: 6.6 %

Soak time 2: 1 min

This gives a depositon rate of about 2.5 Å/s (to be set in the process parameters).

To get the right thickness measurement of the quartz crystals, use the prameters

Density: 10.5 (thermal evap. of Al 2.7)

Z-ratio: 0.529 (thermal evap. of Al 1.08)

Master Tooling should be set to: 120% (to get the requested layer thickness on the wafer). (Master tooling for Al = 167%).



(15 pellets (1/8" diameter x 1/8" long) were placed in the boat before the evaporation processes were started. More than 4000 Å could be deposited from that amount, without any problem with covered contacts or smilar things.)

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