Specific Process Knowledge/Thin film deposition/Deposition of Silver: Difference between revisions
→Thermal deposition of Silver: new subpage for thermal evap |
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*smaller pieces | *smaller pieces | ||
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*Up to | *Up to 1x8" wafers | ||
*smaller pieces | *smaller pieces | ||
very bad uniformity above 4" wafers | |||
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*6x6" wafers or | *6x6" wafers or | ||