Specific Process Knowledge/Lithography/4562: Difference between revisions
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==Spin coating== | ==Spin coating== | ||
[[Image:4562spincurves.JPG|500x500px|thumb|Spin curves for AZ | [[Image:4562spincurves.JPG|500x500px|thumb|Spin curves for AZ 4562 using 60s spin-off and 60s@100°C softbake on LabSpin, and 30s spin-off and 300s@100°C 1mm proximity softbake on Gamma]] | ||
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