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Specific Process Knowledge/Lithography/4562: Difference between revisions

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==Spin coating==
==Spin coating==


[[Image:4562spincurves.JPG|500x500px|thumb|Spin curves for AZ MiR 701 (29cps) using a 30s spin-off, and a 60s@90°C softbake (proximity bake for Gamma)]]
[[Image:4562spincurves.JPG|500x500px|thumb|Spin curves for AZ 4562 using 60s spin-off and 60s@100°C softbake on LabSpin, and 30s spin-off and 300s@100°C 1mm proximity softbake on Gamma]]


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