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Specific Process Knowledge/Thin film deposition/Deposition of Germanium: Difference between revisions

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* [[/Thermal Ge deposition Wordentec|Thermal deposition of Ge in Wordentec]]
* [[/Thermal Ge deposition Wordentec|Thermal deposition of Ge in Wordentec]]


==Ge deposition equipment comparison==


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* Quartz wafers  
* Quartz wafers  
* Pyrex wafers  
* Pyrex wafers  
|
*Silicon wafers
*Quartz wafers
*Pyrex wafers
*See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet]


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