Specific Process Knowledge/Thin film deposition/Deposition of Germanium: Difference between revisions
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* [[/Thermal Ge deposition Wordentec|Thermal deposition of Ge in Wordentec]] | * [[/Thermal Ge deposition Wordentec|Thermal deposition of Ge in Wordentec]] | ||
==Ge deposition equipment comparison== | |||
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* Quartz wafers | * Quartz wafers | ||
* Pyrex wafers | * Pyrex wafers | ||
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*Silicon wafers | |||
*Quartz wafers | |||
*Pyrex wafers | |||
*See also the [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=429 cross-contamination sheet] | |||
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