Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Difference between revisions

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==Cleaning of wafers or chips that have been out of the cleanroom==  
==Cleaning of samples that have been out of the cleanroom==  
[[Image:Sonic-clean.jpg|300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room. ]]
[[Image:Sonic-clean.jpg|300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room (gowning). ]]
The soap sonic is done in a ultrasonic tank placed in the wash bench in the changing room. The soap sonic is DI water with Triton x100 which is free of alkalies. It is used for wafers or chips that has been out of the cleanroom eg. if they have been diced, and you want to bring them in again for measurement or further processing. The soap sonic clean is not enough, you also have to make a piranha clean. If your samples cannot withstand piranha then you must ask Danchip for special permission to bring in your samples without the piranha.
The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is free of alkalies. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.
 
It is used for samples (typical wafers or chips) that have been out of the cleanroom e.g. if they have been diced, and you want to bring them in again for measurement or further processing. In most cases the Triton X-100 sonic clean is not enough. The samples will also have to be cleaned in a piranha solution. If your samples cannot withstand piranha then you must ask DTU Danchip for special permission to bring in your samples without the piranha.


===Procedure===
===Procedure===
You fill up the tank with DI water and add 20 - 30 drops of Triton x100 soap. Start the sonic and leave for 10 min. rinse, dry and continue with piranha.
 
Fill up the tank with DI water
Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use the undiluted Triton X-100)
Start ultrasonics using the front panel button
Leave sample in ultrasonics for 10 min
Switch off ultrasonics
Fill rinse bath with DI water and rinse samples
Remove samples and dry them
Dump the Triton X-100 and rinse bath to drain. Rinse tanks with DI water.
Continue with piranha.

Revision as of 08:02, 22 August 2018

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Cleaning of samples that have been out of the cleanroom

Soap sonic clean placed in the wash bench in the changing room (gowning).

The soap sonic is done in a tank with ultrasonics placed in the cleaning bench in the changing room. The cleaning solution is DI water to which a little diluted Triton X-100 is added. Triton X-100 is a nonionic detergent which is free of alkalies. This detergent is added to reduce surface tension and thus help removing particles from the samples to be cleaned.

It is used for samples (typical wafers or chips) that have been out of the cleanroom e.g. if they have been diced, and you want to bring them in again for measurement or further processing. In most cases the Triton X-100 sonic clean is not enough. The samples will also have to be cleaned in a piranha solution. If your samples cannot withstand piranha then you must ask DTU Danchip for special permission to bring in your samples without the piranha.

Procedure

Fill up the tank with DI water Add 20 - 30 drops of diluted Triton X-100 detergent (From the rinse/spray bottle. Do NOT use the undiluted Triton X-100) Start ultrasonics using the front panel button Leave sample in ultrasonics for 10 min Switch off ultrasonics Fill rinse bath with DI water and rinse samples Remove samples and dry them Dump the Triton X-100 and rinse bath to drain. Rinse tanks with DI water. Continue with piranha.