Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
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|1Å/s to 5Å/s | |1Å/s to 5Å/s | ||
|10Å/s to 15Å/s | |10Å/s to 15Å/s | ||
|~2.5 Å/s | |Depending on process parameters (see [[/Sputter rates for Al|here]]), up to ~2.5 Å/s | ||
|~8Å/s to 15Å/s | |~8Å/s to 15Å/s | ||
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