Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Difference between revisions
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The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>). | The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>). | ||
<b>Recipe: AZO 25T</b> | |||
<b>Maximum deposition thickness: xx nm</b> | |||
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b> | |||
{| border="2" cellspacing="2" cellpadding="9" align="none" | |||
|- | |||
!# macrocycles | |||
|colspan="8" align="center"|<i>n</i> | |||
|- | |||
!# cycles | |||
|colspan="4" align="center"|25 | |||
|colspan="4" align="center"|1 | |||
|- | |||
!Precursor | |||
!DEZ | |||
!DEZ | |||
!H<sub>2</sub>O | |||
!H<sub>2</sub>O | |||
!TMA | |||
!TMA | |||
!H<sub>2</sub>O | |||
!H<sub>2</sub>O | |||
|- | |||
!Nitrogen flow | |||
| | |||
| | |||
|200 sccm | |||
|200 sccm | |||
|150 sccm | |||
|150 sccm | |||
|200 sccm | |||
|200 sccm | |||
|- | |||
!Pulse time | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|- | |||
!Purge time | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|- | |||
|} | |||
<b>How to fill out the process log in LabManager:</b> | |||
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle. | |||
DEZ pulse time: (0.1 + 0.1) s * 25 = 5 s | |||
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s | |||
H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 5.2 s | |||
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>). | |||
<b>Recipe: AZO 30T</b> | |||
<b>Maximum deposition thickness: xx nm</b> | |||
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b> | |||
{| border="2" cellspacing="2" cellpadding="9" align="none" | |||
|- | |||
!# macrocycles | |||
|colspan="8" align="center"|<i>n</i> | |||
|- | |||
!# cycles | |||
|colspan="4" align="center"|30 | |||
|colspan="4" align="center"|1 | |||
|- | |||
!Precursor | |||
!DEZ | |||
!DEZ | |||
!H<sub>2</sub>O | |||
!H<sub>2</sub>O | |||
!TMA | |||
!TMA | |||
!H<sub>2</sub>O | |||
!H<sub>2</sub>O | |||
|- | |||
!Nitrogen flow | |||
| | |||
| | |||
|200 sccm | |||
|200 sccm | |||
|150 sccm | |||
|150 sccm | |||
|200 sccm | |||
|200 sccm | |||
|- | |||
!Pulse time | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|- | |||
!Purge time | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|- | |||
|} | |||
<b>Recipe: AZO 35T</b> | |||
<b>Maximum deposition thickness: xx nm</b> | |||
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b> | |||
{| border="2" cellspacing="2" cellpadding="9" align="none" | |||
|- | |||
!# macrocycles | |||
|colspan="8" align="center"|<i>n</i> | |||
|- | |||
!# cycles | |||
|colspan="4" align="center"|35 | |||
|colspan="4" align="center"|1 | |||
|- | |||
!Precursor | |||
!DEZ | |||
!DEZ | |||
!H<sub>2</sub>O | |||
!H<sub>2</sub>O | |||
!TMA | |||
!TMA | |||
!H<sub>2</sub>O | |||
!H<sub>2</sub>O | |||
|- | |||
!Nitrogen flow | |||
| | |||
| | |||
|200 sccm | |||
|200 sccm | |||
|150 sccm | |||
|150 sccm | |||
|200 sccm | |||
|200 sccm | |||
|- | |||
!Pulse time | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|0.1 s | |||
|- | |||
!Purge time | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|0.5 s | |||
|20.0 s | |||
|- | |||
|} |
Revision as of 09:43, 10 January 2017
THIS PAGE IS UNDER CONSTRUCTION![Under construction.png](/images/thumb/f/f8/Under_construction.png/200px-Under_construction.png.jpeg)
EtZn2O = DEZ
Recipe: AZO 20T
Maximum deposition thickness: xx nm
Temperature: x oC - xx oC
# macrocycles | n | |||||||
---|---|---|---|---|---|---|---|---|
# cycles | 20 | 1 | ||||||
Precursor | DEZ | DEZ | H2O | H2O | TMA | TMA | H2O | H2O |
Nitrogen flow | 200 sccm | 200 sccm | 150 sccm | 150 sccm | 200 sccm | 200 sccm | ||
Pulse time | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s |
Purge time | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s |
How to fill out the process log in LabManager:
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.
DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
H2O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 4.2 s
The number of cycles for each precursor now equals the number of macrocycles (n).
Recipe: AZO 25T
Maximum deposition thickness: xx nm
Temperature: x oC - xx oC
# macrocycles | n | |||||||
---|---|---|---|---|---|---|---|---|
# cycles | 25 | 1 | ||||||
Precursor | DEZ | DEZ | H2O | H2O | TMA | TMA | H2O | H2O |
Nitrogen flow | 200 sccm | 200 sccm | 150 sccm | 150 sccm | 200 sccm | 200 sccm | ||
Pulse time | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s |
Purge time | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s |
How to fill out the process log in LabManager:
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.
DEZ pulse time: (0.1 + 0.1) s * 25 = 5 s
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
H2O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 5.2 s
The number of cycles for each precursor now equals the number of macrocycles (n).
Recipe: AZO 30T
Maximum deposition thickness: xx nm
Temperature: x oC - xx oC
# macrocycles | n | |||||||
---|---|---|---|---|---|---|---|---|
# cycles | 30 | 1 | ||||||
Precursor | DEZ | DEZ | H2O | H2O | TMA | TMA | H2O | H2O |
Nitrogen flow | 200 sccm | 200 sccm | 150 sccm | 150 sccm | 200 sccm | 200 sccm | ||
Pulse time | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s |
Purge time | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s |
Recipe: AZO 35T
Maximum deposition thickness: xx nm
Temperature: x oC - xx oC
# macrocycles | n | |||||||
---|---|---|---|---|---|---|---|---|
# cycles | 35 | 1 | ||||||
Precursor | DEZ | DEZ | H2O | H2O | TMA | TMA | H2O | H2O |
Nitrogen flow | 200 sccm | 200 sccm | 150 sccm | 150 sccm | 200 sccm | 200 sccm | ||
Pulse time | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s | 0.1 s |
Purge time | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s | 0.5 s | 20.0 s |