Jump to content

Specific Process Knowledge/Thin film deposition/Deposition of Molybdenum: Difference between revisions

Knil (talk | contribs)
Paphol (talk | contribs)
Line 4: Line 4:


== Molybdenum deposition ==
== Molybdenum deposition ==
Molybdenum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. In [[Specific Process Knowledge/Thin film deposition/Multisource PVD|PVD co-sputter/evaporation]] only VERY thin layers of Mo can be deposited.
Molybdenum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.  
 
 


{| border="1" cellspacing="0" cellpadding="4"  
{| border="1" cellspacing="0" cellpadding="4"