Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE/Nitride etch with DUV mask: Difference between revisions

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==Silicon nitride etch with STS recommended silicon nitride recipe==




Revision as of 16:05, 15 March 2016

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Silicon nitride etch with STS recommended silicon nitride recipe

Silicon nitride etch with the standard silicon oxide etch

  • Etch of LPCVD nitride with DUV KRF resist as mask. The mask is still on. Made by BGHE February 2015

  • Profile of lines with 1µm pitch

  • Profile of lines with 4µm pitch

  • Profile of 2µm line - zoom in on 4µm pitch

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