Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE/Nitride etch with DUV mask: Difference between revisions
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<gallery caption="Etch of LPCVD nitride with DUV KRF resist as mask. The mask is still on" widths="300px" heights="250px" perrow="3"> | <gallery caption="Etch of LPCVD nitride with DUV KRF resist as mask. The mask is still on" widths="300px" heights="250px" perrow="3"> | ||
image:DUV_sin_01_2min17.jpg|Profile of lines with 1µm pitch | image:DUV_sin_01_2min17.jpg|Profile of lines with 1µm pitch | ||
image:DUV_sin_01_2min19.jpg|Profile of lines with | image:DUV_sin_01_2min19.jpg|Profile of lines with 4µm pitch | ||
image:DUV_sin_01_2min20.jpg|Profile of line - zoom in on | image:DUV_sin_01_2min20.jpg|Profile of 2µm line - zoom in on 4µm pitch | ||
</gallery> | </gallery> |
Revision as of 13:52, 16 October 2015
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Profile of lines with 1µm pitch
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Profile of lines with 4µm pitch
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Profile of 2µm line - zoom in on 4µm pitch