Specific Process Knowledge/Thin film deposition/Deposition of Alumina: Difference between revisions
Appearance
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*RF sputtering from Al<sub>2</sub>O<sub>3</sub> target | *RF sputtering from Al<sub>2</sub>O<sub>3</sub> target | ||
*Reactive Sputtering | *Reactive Sputtering (never tested) | ||
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*Reactive Sputtering | *Reactive Sputtering | ||