Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing/Acceptance test: Difference between revisions

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==Results==
==Results==


The oxide thickness has been measured in 13 points on each wafer using the M-2000V ellipsometer.
The oxide thickness and the refractive index has been measured in 13 points on each wafer using the M-2000V ellipsometer.


{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
Line 120: Line 120:
| 2.1
| 2.1
| 2.0
| 2.0
|}
The oxide thickness has been measured in 13 points on each wafer using the M-2000V ellipsometer.
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|-
!
! Date
! colspan="3" | Wafer 4
! colspan="3" | Wafer 16
! colspan="3" | Wafer 28
! colspan="3" | Center point only
|-
! width="80" | 
! width="80" |
! width="70" | Average refractive index
! width="70" | St. deviation
! width="70" | Non-uniformity [%]
! width="70" | Average refractive index
! width="70" | St. deviation
! width="70" | Non-uniformity [%]
! width="70" | Average refractive index
! width="70" | St. deviation
! width="70" | Non-uniformity [%]
! width="70" | Average refractive index
! width="70" | St. deviation
! width="70" | Non-uniformity [%]
|-
! Run 1
| 28-01-2015
| 1.46
| 0.00
| 0.04
| 1.46
| 0.00
| 0.09
| 1.46
| 0.00
| 0.06
| 1.4609
| 0.0004
| 0.0230
|-
! Run 2
| 28-01-2015
| 1.46
| 0.00
| 0.09
| 1.46
| 0.00
| 0.17
| 1.46
| 0.00
| 0.05
| 1.4561
| 0.0094
| 05873
|-
! Run 3
| 30-01-2015
| 1.46
| 0.00
| 0.06
| 1.44
| 0.01
| 0.69
| 1.46
| 0.00
| 0.07
| 1.4602
| 0.0004
| 0.0291
|-
! Average
|
| 1.46
| 0.00
| 0.06
| 1.16
| 0.00
| 0.10
| 1.46
| 0.00
| 0.27
| 1.46
| 0.00
| 0.21
|}
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|-
! colspan="3" | Run-to-run
|-
! width="90" | Average refractive index
! width="90" | St. deviation
! width="90" | Non-uniformity [%]
|-
| 1.4591
| 0.0026
| 0.1637
|}
|}

Revision as of 09:29, 12 August 2015

THIS PAGE IS UNDER CONSTRUCTION

The acceptance for the Multipurpose Anneal furnace was performed in November 2014 by ATV Technologie.



Recipe: "vr_dryOx_1000C_120min_150_5Wafer_D1_mit_Inliner_oPurgering.ATV"

Oxidation time: 80 min

Oxidation temperature: 1050 oC (all temoperature zones)

O2 flow: 1 slm

The oxidation has been done with 150 mm wafer, and with 30 wafers in the furnace.

Wafer 4 (towards the door), wafer 16 and wafer 28 (towards the service area) were measured.

Results

The oxide thickness and the refractive index has been measured in 13 points on each wafer using the M-2000V ellipsometer.

Date Wafer 4 Wafer 16 Wafer 28 Center point only
Average oxide thickness [nm] St. deviation Non-uniformity [%] Average oxide thickness [nm] St. deviation Non-uniformity [%] Average oxide thickness [nm] St. deviation Non-uniformity [%] Average oxide thickness [nm] St. deviation Non-uniformity [%]
Run 1 28-01-2015 109.7 1.0 1.7 107.7 0.9 1.1 106.5 0.8 1.2 107.0 2.1 1.9
Run 2 28-01-2015 107.3 1.7 2.4 105.0 1.4 1.7 107.3 0.7 0.9 105.7 1.0 0.9
Run 3 30-01-2015 103.6 0.8 1.1 102.6 0.6 1.2 102.2 0.6 1.1 102.9 1.0 1.0
Average 106.9 1.2 1.7 105.1 1.0 1.3 105.3 0.7 1.1 105.2 1.4 1.3


Run-to-run
Average oxide thickness [nm] St. deviation Non-uniformity [%]
105.2 2.1 2.0


The oxide thickness has been measured in 13 points on each wafer using the M-2000V ellipsometer.

Date Wafer 4 Wafer 16 Wafer 28 Center point only
Average refractive index St. deviation Non-uniformity [%] Average refractive index St. deviation Non-uniformity [%] Average refractive index St. deviation Non-uniformity [%] Average refractive index St. deviation Non-uniformity [%]
Run 1 28-01-2015 1.46 0.00 0.04 1.46 0.00 0.09 1.46 0.00 0.06 1.4609 0.0004 0.0230
Run 2 28-01-2015 1.46 0.00 0.09 1.46 0.00 0.17 1.46 0.00 0.05 1.4561 0.0094 05873
Run 3 30-01-2015 1.46 0.00 0.06 1.44 0.01 0.69 1.46 0.00 0.07 1.4602 0.0004 0.0291
Average 1.46 0.00 0.06 1.16 0.00 0.10 1.46 0.00 0.27 1.46 0.00 0.21


Run-to-run
Average refractive index St. deviation Non-uniformity [%]
1.4591 0.0026 0.1637
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