Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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In the jdf-file, manually create a shot modulation (similar to the jdi-file created by PEC) that fits to the number of layers in your v30-file. This shot modulation should be defined in the end of the jdf-file (see the sdf- and jdf-file manual). In the example below, the six layers are defined to have shot modulation from -20 % to 80 % of the base-dose: | In the jdf-file, manually create a shot modulation (similar to the jdi-file created by PEC) that fits to the number of layers in your v30-file. This shot modulation should be defined in the end of the jdf-file (see the sdf- and jdf-file manual). In the example below, the six layers are defined to have shot modulation from -20 % to 80 % of the base-dose: | ||
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<pre> | <pre> | ||